ENME476: Microelectromechanical Systems (MEMS)

In this course the student will develop and/or refine the following areas of knowledge:

• Know what types of MEMS devices there are and when it makes sense to fabricate one
• Understand the basic concepts of semiconductor device physics
• Understand the micromachining techniques, including what they are, when to use them, and what needs to be considered when using them
• Demonstrate proficiency in designing process sequences
• Be able to perform basic photolithography and patterning steps
• Learn to keep a good laboratory notebook
• Write a good quality design report
• Demonstrate life learning skills such as using electronic databases, reading the journal literature, and learning by reading
• Preparing students for graduate study or employment in MEMS
• Demonstrating the relationships between various materials used in MEMS and how their properties can be exploited in devices and/or in device fabrication
• Familiarizing students with various fabrication techniques, including those on the cutting edge, and how they can be combined to create various devices
• Providing the students with an understanding of the physics underlying the engineering

Classroom: Introduction to MEMS, transducers, markets, information resources, MEMS fabrication processes and materials, bulk micromachining, wet etching, dry etching, surface micromachining, sacrificial layers, film deposition, bonding, sacrificial layers, non-traditional micromachining, introduction to solid state physics, crystal lattices, basic atomic physics, band structure, semiconductors, band structure, doping, p-n junctions

Laboratory: safety, MSDSs, photolithography (resist spinning, alignment, exposure, development, alignment to a previous pattern), profilometry, wet etching of metals, oxide, and Si, device testing, keeping a good laboratory notebook