Semesters Offered

Learning Objectives

In this course the student will develop and/or refine the following areas of knowledge:

  • Know what types of MEMS devices there are and when it makes sense to fabricate one
  • Understand the basic concepts of semiconductor device physics
  • Understand the micromachining techniques, including what they are, when to use them, and what needs to be considered when using them
  • Demonstrate proficiency in designing process sequences
  • Be able to perform basic photolithography and patterning steps
  • Learn to keep a good laboratory notebook
  • Write a good quality design report
  • Demonstrate life learning skills such as using electronic databases, reading the journal literature, and learning by reading
  • Preparing students for graduate study or employment in MEMS
  • Demonstrating the relationships between various materials used in MEMS and how their properties can be exploited in devices and/or in device fabrication
  • Familiarizing students with various fabrication techniques, including those on the cutting edge, and how they can be combined to create various devices
  • Providing the students with an understanding of the physics underlying the engineering


Topics Covered

Classroom: Introduction to MEMS, transducers, markets, information resources, MEMS fabrication processes and materials, bulk micromachining, wet etching, dry etching, surface micromachining, sacrificial layers, film deposition, bonding, sacrificial layers, non-traditional micromachining, introduction to solid state physics, crystal lattices, basic atomic physics, band structure, semiconductors, band structure, doping, p-n junctions

Laboratory: safety, MSDSs, photolithography (resist spinning, alignment, exposure, development, alignment to a previous pattern), profilometry, wet etching of metals, oxide, and Si, device testing, keeping a good laboratory notebook


Learning Outcomes

  • an ability to apply knowledge of mathematics, science, and engineering
  • an ability to design and conduct experiments, as well as to analyze and interpret data
  • an ability to design a system, component, or process to meet desired needs within realistic constraints such as economic, environmental, social, political, ethical, health and safety, manufacturability, and sustainability
  • an ability to identify, formulate, and solve engineering problems
  • an ability to communicate effectively
  • a recognition of the need for, and an ability to engage in life-long learning
  • a knowledge of contemporary issues

Additional Course Information


Smela, Elisabeth


Required book:

  • G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, WCB/McGraw-Hill, Boston, 1998. ISBN 0-07-290722-3.


  • B. G. Streetman and S. Banerjee, “Solid State Electronic Devices”, Fifth Edition, Prentice Hall, Saddle River, 2000. ISBN 0-13-025538-6

Class/Laboratory Schedule 

  • Two 75-minute lecture sessions per week
  • Five 3-hour laboratories during the semester
  • One in-class examination plus a final examination
Last Updated By 
Elisabeth Smela